Approaches and Equipment for Microsystems
| Johann Haimerl Fachhochschule Regensburg Postfach 12 03 27 93025 Regensburg Germany  |
Helmut Hummel Hauptstr. 6 84069 Schierling Germany  |
Mister has developed and provides commercially 2 metrological instruments:
Fiber Thickness Probe for thin films
| Large measurement range (20 nm ... 100 µm) | Great usability |
| in situ measurement (e.g.deposition/etch) | Fast software |
- minimal footprint
- any transparent or partial transparent film
(film library and user defined) - double layers
- excellent consistency of measuring values
- large working distance
- low cost
| WiT1000 Demo |
|---|
3D Optical Microprofilometer
Two complementary sensors for rough and smooth surfaces
vertical range: +/- 3 mm
vertical resolution: 0.1 µm
scan area: 10 cm x 5 cm
Applications:
- microsystems
- micromachining
- microelectronics
- assembling
- precision mechanics
- optoelectronics
- optical systems